TY  - JOUR
AU  - Hendricks, Jay
AU  - Aquino-Class, M
AU  - Maslar, James
AU  - Zachariah, Michael
C2  - Chemistry of Materials
DA  - 1998-07-01
LA  - en
M1  - No. 10
PB  - Chemistry of Materials
PY  - 1998
TI  - Metal and Ceramic Thin Film Growth by Reaction of Alkali Metals with Metal Halides: A New Route for Low Temperature CVD
ER  -