TY  - CONF
AU  - Hendricks, Jay
AU  - Aquino-Class, M
AU  - Zachariah, Michael
C2  - Materials Research Society Proceedings
DA  - 1999-12-01
LA  - en
M1  - 555
PB  - Materials Research Society Proceedings
PY  - 1999
TI  - A New Low Temperature Chemical Vapor Deposition Technique For Growing Thin Films of Ti, TiN on Copper and TiO2, TixSiy on Silicon
ER  -