TY  - CONF
AU  - Kreider, Kenneth
AU  - Gillen, John
C2  - Proceedings of the 7th International Conference on Advanced Thermal Processing of Semiconductors
DA  - 1999-07-01
LA  - en
PB  - Proceedings of the 7th International Conference on Advanced Thermal Processing of Semiconductors
PY  - 1999
TI  - Thin-Film Calibration Wafer Materials for RTP Temperature Measurement
ER  -