TY  - CONF
AU  - Sohn, Martin
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Silver, Richard
C2  - Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA
DA  - 2015-09-09
DO  - https://doi.org/10.1117/12.2188224
LA  - en
M1  - 9556
PB  - Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA
PY  - 2015
TI  - Quantitative tool characterization of a 193 nm scatterfield microscope
ER  -