TY  - CONF
AU  - Barnes, Bryan
AU  - Goasmat, Francois
AU  - Sohn, Martin
AU  - Zhou, Hui
AU  - Arceo, Abraham
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2013-04-10
DO  - https://doi.org/10.1117/12.2012250
LA  - en
M1  - 8681
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2013
TI  - Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus
ER  -