TY - CONF AU - Qin, Jing AU - Zhou, Hui AU - Barnes, Bryan AU - Dixson, Ronald AU - Silver, Richard C2 - OSA Technical Digests, Alexandria, VA DA - 2013-06-23 DO - https://doi.org/10.1364/AOPT.2013.JTu4A.32 LA - en PB - OSA Technical Digests, Alexandria, VA PY - 2013 TI - 3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties ER -