TY  - CONF
AU  - Barnes, Bryan
AU  - Mark, 
AU  - Sohn, Martin
AU  - Zhou, Hui
AU  - Silver, Richard
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2016-04-04
DO  - https://doi.org/10.1117/12.2221920
LA  - en
M1  - 9778
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2016
TI  - Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
ER  -