TY  - CONF
AU  - Attota, Ravikiran
AU  - Vertanian, Victor
AU  - Olson, Steve
AU  - Edgeworth, Robert
AU  - Ali, Iqbal
AU  - Huffman, Craig
AU  - Moschak, Pate
AU  - Lazier, Harry
AU  - Lorenzini, Elizabeth
C2  - Frontiers of Characterization and Metrology for Nanoelectronics
, Gaithersburg, MD
DA  - 2013-01-23
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics
, Gaithersburg, MD
PY  - 2013
TI  - TSV REVEAL HEIGHT AND BUMP DIMENSION METROLOGY BY THE TSOM METHOD: FROM NANOMETER TO MICROMETER SCALE
ER  -