TY - JOUR AU - Shaw, Justin AU - Hoogeboom-Pot, Kathleen AU - Hernandez-Charpak, Jorge AU - Kapteyn, Henry AU - Murnane, Margaret AU - Nardi, Damiano C2 - Applied Physics Letters DA - 2015-04-21 LA - en PB - Applied Physics Letters PY - 2015 TI - Nondestructive measurement of the evolution of layer-specific mechanical properties in sub-10nm bilayer films ER -