TY  - CONF
AU  - Yu, Liya
AU  - Kasica, Richard
AU  - Newby, Robert
AU  - Chen, Lei
AU  - Luciani, Vincent
C2  - SPIE Advanced Lithography, San Jose, CA
DA  - 2013-03-29
DO  - https://doi.org/10.1117/12.2011681
LA  - en
M1  - 8682
PB  - SPIE Advanced Lithography, San Jose, CA
PY  - 2013
TI  - The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
ER  -