TY  - JOUR
AU  - Barnes, Bryan
AU  - Sohn, Martin
AU  - Goasmat, Francois
AU  - Zhou, Hui
AU  - Vladar, Andras
AU  - Silver, Richard
AU  - Arceo, Abraham
C2  - Optics Express
DA  - 2013-10-25
DO  - https://doi.org/10.1364/OE.21.026219
LA  - en
M1  - 21
PB  - Optics Express
PY  - 2013
TI  - Three-dimensional deep sub-wavelength defect detection using (lambda) = 193 nm optical microscopy
ER  -