TY  - JOUR
AU  - Duff, Shannon
AU  - Hilton, Gene
AU  - Hubmayr, Johannes
AU  - Beall, James
AU  - Austermann, Jason
AU  - Becker, Daniel
AU  - Van, Jeffrey
C2  - Journal of Low Temperature Physics
DA  - 2015-07-22
LA  - en
PB  - Journal of Low Temperature Physics
PY  - 2015
TI  - Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919372
ER  -