TY  - CONF
AU  - Wallis, Thomas
AU  - Imtiaz, Atif
AU  - Curtin, Alexandra
AU  - Kabos, Pavel
AU  - Brubaker, Matthew
AU  - Sanford, Norman
AU  - Bertness, Kristine
C2  - Digest of the 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-03-25
LA  - en
PB  - Digest of the 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Spatially-Resolved Dopant Characterization with a Scanning Microwave Microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912802
ER  -