TY  - CHAP
AU  - Gorman, Jason
C2  - Nanopositioning Technologies: Fundamentals and Applications, Springer Science+Business Media, New York, NY
DA  - 2016-01-01
DO  - https://doi.org/10.1007/978-3-319-23853-1
LA  - en
PB  - Nanopositioning Technologies: Fundamentals and Applications, Springer Science+Business Media, New York, NY
PY  - 2016
TI  - MEMS Nanopositioners
ER  -