TY  - CONF
AU  - Johnson, Ward
AU  - Wallis, Thomas
AU  - Kabos, Pavel
AU  - Rocas, Eduard
AU  - Collado, Juan
AU  - Liew, Li-Anne
AU  - Davydov, Albert
AU  - Plankis, Alivia
AU  - Heyliger, Paul
C2  - IEEE Frequency Control Symposium, Baltimore, MD
DA  - 2012-05-21
DO  - https://doi.org/10.1109/FCS.2012.6243722
LA  - en
PB  - IEEE Frequency Control Symposium, Baltimore, MD
PY  - 2012
TI  - A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide
ER  -