TY  - JOUR
AU  - Tison, S
AU  - Mohan, Pardeep
C2  - Journal of Vacuum Science & Technology A
DA  - 1993-11-27
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 1993
TI  - Using characterized variable reservoir helium permeation leaks to generate low flows
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920806
ER  -