TY  - JOUR
AU  - Dixson, Ronald
AU  - Guthrie, William
AU  - Allen, Richard
AU  - Orji, Ndubuisi
AU  - Cresswell, Michael
AU  - Murabito, Christine
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-03-09
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Process Optimization for Lattice-Selective Wet Etching of Crystalline Silicon Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919919
ER  -