TY - JOUR AU - Vissers, Michael AU - Kline, Jeffrey AU - Gao, Jiansong AU - Wisbey, David AU - Pappas, David C2 - Applied Physics Letters DA - 2012-02-20 DO - https://doi.org/10.1063/1.3683552 LA - en M1 - 100 PB - Applied Physics Letters PY - 2012 TI - Reduced microwave loss in trenched superconducting coplanar waveguides ER -