TY  - JOUR
AU  - Sunday, Daniel
AU  - List, Scott
AU  - Chawla, Jasmeet
AU  - Kline, Regis
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2016-02-17
LA  - en
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2016
TI  - Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering
ER  -