TY  - JOUR
AU  - Attota, Ravikiran
AU  - Weck, Peter
AU  - Kramar, John
AU  - Benjamin, Bunday
AU  - Vartanian, Victor
C2  - Optics Express
DA  - 2016-07-14
DO  - https://doi.org/10.1364/OE.24.016574
LA  - en
PB  - Optics Express
PY  - 2016
TI  - Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy
ER  -