TY  - JOUR
AU  - Sohn, Martin
AU  - Barnes, Bryan
AU  - Silver, Richard
C2  - Optik
DA  - 2018-03-01
DO  - https://doi.org/10.1016/j.ijleo.2017.11.206
LA  - en
M1  - 156
PB  - Optik
PY  - 2018
TI  - Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy
ER  -