TY - JOUR AU - Copeland, Craig AU - McGray, Craig AU - Geist, Jon AU - Aksyuk, Vladimir AU - Stavis, Samuel C2 - Microsystems & Nanoengineering DA - 2016-09-12 DO - https://doi.org/10.1038/micronano.2016.55 LA - en M1 - 2 PB - Microsystems & Nanoengineering PY - 2016 TI - Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales ER -