TY  - CHAP
AU  - Mulholland, George
AU  - Childs, K
AU  - Narum, D
AU  - LaVanier, L
AU  - Lindley, P
AU  - Schueler, B
AU  - Diebold, A
C2  - Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, , -1
DA  - 1996-07-31
LA  - en
PB  - Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, , -1
PY  - 1996
TI  - Comparison of Submicron Particle Analysis by Auger Electron Spectroscopy, Time-of-Flight Secondary Ion Mass Spectrometry, and Secondary Electron Microscopy With Energy Dispersive X-Ray Spectroscopy.
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916968
ER  -