TY - SER AU - Sanabia, Jason AU - Goldie, S AU - Ratliff, L AU - Goldner, Lori AU - Gillaspy, John C2 - Melville, NY, DA - 2003-01-01 LA - en M1 - 680 PB - Melville, NY, PY - 2003 TI - Highly Charged Ion Bombardment of Silicon Surfaces, ed. by J.L. Duggan and I.L. Morgan ER -