TY  - JOUR
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Garcia-Gutierrez, Domingo
AU  - Benjamin, Bunday
AU  - Bishop, M
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Allgair, John
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-10-13
DO  - https://doi.org/10.1117/1.JMM.15.4.044002
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Transmission Electron Microscope Calibration Methods for Critical Dimension Standards
ER  -