TY  - JOUR
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Boon, 
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-12-15
DO  - https://doi.org/10.1117/1.JMM.15.4.044006
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Contour Metrology using Critical Dimension Atomic Force Microscopy
ER  -