TY  - CONF
AU  - Hill, Shannon
AU  - Faradzhev, Nadir
AU  - Tarrio, Charles
AU  - Lucatorto, Thomas
AU  - Bartynski, Robert
AU  - B., 
AU  - T., 
C2  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
DA  - 2009-10-01
LA  - en
M1  - 7271
PB  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
PY  - 2009
TI  - Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons
ER  -