TY  - CONF
AU  - Hill, Shannon
AU  - Faradzhev, Nadir
AU  - Tarrio, Charles
AU  - Lucatorto, Thomas
AU  - Madey, T.
AU  - Yakshinskiy, B.
AU  - Loginova, E.
AU  - Yulin, S.
C2  - Proceedings of SPIE:  Emerging Lithographic Technologies XII, San Jose, CA
DA  - 2008-10-01
LA  - en
M1  - 6921
PB  - Proceedings of SPIE:  Emerging Lithographic Technologies XII, San Jose, CA
PY  - 2008
TI  - Accelerated Lifetime Metrology of EUV Multilayer Mirrors in Hydrocarbon Environments
ER  -