TY  - JOUR
AU  - Josell, Daniel
AU  - Moffat, Thomas
C2  - ECS Transactions
DA  - 2016-09-23
LA  - en
PB  - ECS Transactions
PY  - 2016
TI  - The Suppression Breakdown induced S-NDR Mechanism for Defect-Free Filling of High Aspect Ratio Features
ER  -