TY  - JOUR
AU  - Kimes, William
AU  - Maslar, James
AU  - Moore, Elizabeth
C2  - Review of Scientific Instruments
DA  - 2012-08-13
DO  - https://doi.org/10.1063/1.4742991
LA  - en
M1  - 83
PB  - Review of Scientific Instruments
PY  - 2012
TI  - Perpendicular-Flow, Single-Wafer Atomic Layer Deposition Reactor Chamber Design for use with In Situ Diagnostics
ER  -