TY  - SER
AU  - Sunday, Daniel
AU  - Kline, Regis
C2  - Pan Stanford Publishing, Boca Raton, FL
DA  - 2016-11-21
LA  - en
PB  - Pan Stanford Publishing, Boca Raton, FL
PY  - 2016
TI  - X-ray Metrology for Semiconductors
ER  -