TY  - CONF
AU  - Hagmann, Joseph
AU  - Wang, Xiqiao
AU  - Namboodiri, Pradeep
AU  - Silver, Richard
AU  - Richter, Curt
C2  - International Semiconductor Device Research Symposium 2016, Bethesda, MD
DA  - 2016-12-07
LA  - en
PB  - International Semiconductor Device Research Symposium 2016, Bethesda, MD
PY  - 2016
TI  - Atomically precise device fabrication
ER  -