TY  - VIDEO
AU  - Gaitan, Michael
AU  - Lightman, Karen
C2  - Technologies for Future Micro-Nano Manufacturing
DA  - 2011-09-30
LA  - en
PB  - Technologies for Future Micro-Nano Manufacturing
PY  - 2011
TI  - ROADMAPPING MANUFACTURING NEEDS FOR MEMS TECHNOLOGIES
ER  -