TY - CONF AU - Hagmann, Joseph AU - Wang, Xiqiao AU - Namboodiri, Pradeep AU - Wyrick, Jonathan AU - Murray, Roy AU - Stewart, Michael AU - Silver, Richard AU - Richter, Curt C2 - 59th Electronic Materials Conference, Notre Dame, IN DA - 2017-06-29 LA - en PB - 59th Electronic Materials Conference, Notre Dame, IN PY - 2017 TI - Towards single atom devices for quantum information and metrology: weak localization in embedded phosphorus delta layers in silicon ER -