TY  - JOUR
AU  - Zhang, Nien
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Mark, 
AU  - Silver, Richard
C2  - Measurement Science and Technology
DA  - 2017-04-07
DO  - https://doi.org/10.1088/1361-6501/aa5586
LA  - en
M1  - 28
PB  - Measurement Science and Technology
PY  - 2017
TI  - Combining model-based measurement results of critical dimensions from multiple tools
ER  -