TY  - JOUR
AU  - Sunday, Daniel
AU  - Hammond, Matthew
AU  - Wang, Chengqing
AU  - Wu, Wen-Li
AU  - Kline, Regis
AU  - Stein, Gila
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2013-07-15
LA  - en
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2013
TI  - 3D X-ray Metrology for Block Copolymer Lithography Line-Space Patterns
ER  -