TY  - JOUR
AU  - Osborn, William
AU  - Friedman, Lawrence
AU  - Vaudin, Mark
C2  - Ultramicroscopy
DA  - 2017-08-20
LA  - en
PB  - Ultramicroscopy
PY  - 2017
TI  - Strain Measurement of 3D Structured Nanodevices by EBSD
ER  -