TY  - JOUR
AU  - DelRio, Frank
AU  - Friedman, Lawrence
AU  - Gaither, Michael
AU  - Osborn, William
AU  - Cook, Robert
C2  - Journal of Applied Physics
DA  - 2013-09-19
LA  - en
PB  - Journal of Applied Physics
PY  - 2013
TI  - Decoupling small-scale roughness and long-range features on deep reactive ion etched silicon surfaces
ER  -