TY  - JOUR
AU  - Mark, 
AU  - Barnes, Bryan
AU  - Zhou, Hui
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2017-10-19
LA  - en
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2017
TI  - Evaluating the Effects of Modeling Errors for Isolated Finite 3-D Targets
ER  -