TY  - CHAP
AU  - Obeng, Yaw
AU  - Garner, C.
AU  - Herr, Dan
C2  - Frontiers of Characterization and Metrology for Nanoelectronics: 2011, American Institute of Physics, TBD, MD
DA  - 2011-12-28
DO  - https://doi.org/10.1063/1.3657864
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics: 2011, American Institute of Physics, TBD, MD
PY  - 2011
TI  - Metrology and Characterization Challenges for Emerging Research Materials and Devices
ER  -