TY  - JOUR
AU  - Kristen, 
AU  - Sobolewski, Mark
C2  - Journal of Applied Physics
DA  - 2004-07-01
LA  - en
M1  - 96
PB  - Journal of Applied Physics
PY  - 2004
TI  - A Technique for Temperature Mapping in Fluorocarbon Plasmas Using Planar Laser-Induced Fluorescence of CF
ER  -