TY  - CONF
AU  - Osborn, William
AU  - Friedman, Lawrence
AU  - Vaudin, Mark
AU  - Stranick, Stephan
AU  - Gaither, Michael
AU  - Gorham, Justin
AU  - Vartanian, Victor
AU  - Cook, Robert
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-03-26
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Accuracy and Resolution of Nanoscale Strain Measurement Techniques
ER  -