TY  - JOUR
AU  - Hagmann, Joseph
AU  - Wang, Xiqiao
AU  - Namboodiri, Pradeep
AU  - Wyrick, Jonathan
AU  - Murray, Roy
AU  - Stewart, Michael
AU  - Silver, Richard
C2  - Physical Review Applied
DA  - 2018-01-23
LA  - en
PB  - Physical Review Applied
PY  - 2018
TI  - Weak localization thickness measurements of embedded phosphorus delta layers in silicon produced by PH3 dosing
ER  -