TY  - JOUR
AU  - Copeland, Craig
AU  - McGray, Craig
AU  - Geist, Jon
AU  - Stavis, Samuel
C2  - Journal of Microelectromechanical Systems
DA  - 2018-10-25
DO  - https://doi.org/10.1109/JMEMS.2018.2874771
LA  - en
M1  - 27
PB  - Journal of Microelectromechanical Systems
PY  - 2018
TI  - Particle tracking of microelectromechanical system performance and reliability
ER  -