TY  - CONF
AU  - Orji, Ndubuisi
C2  - Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Monterrey, CA
DA  - 2019-04-04
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Monterrey, CA
PY  - 2019
TI  - Metrology requirements for next generation of semiconductor devices
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927435
ER  -