TY - JOUR AU - Olaya, David AU - Castellanos, Manuel AU - Pulecio, Javier AU - Biesecker, John AU - Khadem, Soroush AU - Lewitt, Theodore AU - Hopkins, Peter AU - Dresselhaus, Paul AU - Benz, Samuel C2 - IEEE Transactions on Applied Superconductivity DA - 2019-02-18 DO - https://doi.org/10.1109/TASC.2019.2900020 LA - en M1 - 29 PB - IEEE Transactions on Applied Superconductivity PY - 2019 TI - Planarized process for single-flux-quantum circuits with self-shunted Nb/NbxSi1-x/Nb Josephson junctions ER -