TY  - CONF
AU  - Attota, Ravikiran
AU  - Kang, Hyeonggon
AU  - Bunday, Benjamin
C2  - Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Monterey, CA
DA  - 2019-04-01
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Monterey, CA
PY  - 2019
TI  - Nondestructive and Economical Dimensional Metrology of Deep Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927455
ER  -