TY  - CONF
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Silver, Richard
AU  - Mark, 
C2  - Modeling Aspects in Optical Metrology VII, Munich, -1
DA  - 2019-06-21
DO  - https://doi.org/10.1117/12.2525115
LA  - en
M1  - 11057
PB  - Modeling Aspects in Optical Metrology VII, Munich, -1
PY  - 2019
TI  - Supplementing rigorous electromagnetic modeling with atomistic simulations for optics-based metrology
ER  -