TY - JOUR AU - Barnes, Bryan AU - Mark, AU - Sohn, Martin AU - Zhou, Hui AU - Silver, Richard C2 - Physical Review Applied DA - 2019-06-24 DO - https://doi.org/10.1103/PhysRevApplied.11.064056 LA - en M1 - 11 PB - Physical Review Applied PY - 2019 TI - Assessing form-dependent optical scattering at vacuum- and extreme-ultraviolet wavelengths off nanostructures with two-dimensional periodicity ER -