TY  - JOUR
AU  - Barnes, Bryan
AU  - Henn, Mark-Alexander
AU  - Sohn, Martin
AU  - Zhou, Hui
AU  - Silver, Richard
C2  - ECS Transactions
DA  - 2019-10-04
DO  - https://doi.org/10.1149/09201.0073ecst
LA  - en
M1  - 92
PB  - ECS Transactions
PY  - 2019
TI  - Appraising the extensibility of optics-based metrology for emerging materials
ER  -